Cleanroom Rated Cable — ISO 14644 Compatible Low Outgassing, Low Particulate, Silicone-Free LSZH or PUR Jacketed Multi-Core Flexible Cable with Smooth Non-Shedding Surface for Semiconductor Fab, Pharmaceutical, Biotech, and Precision Manufacturing Cleanroom Equipment Power, Control, and Instrumentation Wiring
Industrial, Mining & Control Cables /Cleanroom Cable

Cleanroom Rated Cable — ISO 14644 Compatible Low Outgassing, Low Particulate, Silicone-Free LSZH or PUR Jacketed Multi-Core Flexible Cable with Smooth Non-Shedding Surface for Semiconductor Fab, Pharmaceutical, Biotech, and Precision Manufacturing Cleanroom Equipment Power, Control, and Instrumentation Wiring

Cleanroom rated cable: ISO 14644 compatible, low outgassing, low particulate, silicone-free. LSZH or PUR smooth jacket, multi-core flexible. For semiconductor fab, pharma, biotech equipment wiring. Non-shedding, cleanroom-compatible materials. CE, RoHS.

Key Features

ISO 14644 cleanroom compatible — the cable materials, jacket surface finish, and packaging are selected and controlled to minimise particulate generation, outgassing, and contamination of the cleanroom environment; the cable does not shed fibres, particles, or chemical contaminants that would compromise the cleanroom's ISO class rating
Smooth, non-porous, non-shedding PUR or LSZH outer jacket — the jacket surface is extruded with a smooth, glossy finish that does not trap particles and can be wiped clean with cleanroom-compatible cleaning agents; PVC jackets (which contain plasticizers that migrate to the surface and trap particles) and braided jackets (which shed fibres) are not suitable for cleanroom use
Silicone-free — the cable contains no silicone rubber, silicone lubricants, or silicone release agents in any component; silicone outgassing (low molecular weight siloxanes) condenses on wafer surfaces in semiconductor fabs, causing defects in photolithography and thin-film deposition processes; silicone-free cable is mandatory for semiconductor cleanroom applications
Low outgassing — the cable jacket, insulation, and filler materials are formulated and tested for low volatile organic compound (VOC) emission per SEMI E49 / ASTM E595 / ISO 14644-8; outgassed organic compounds condense on optical surfaces, wafer surfaces, and pharmaceutical product contact surfaces, causing contamination
Halogen-free LSZH or PUR jacket — LSZH for fire safety in enclosed cleanroom environments where halogen acid gas from a PVC cable fire would contaminate the entire cleanroom and require months of decontamination; PUR for applications where the cable is exposed to the cleaning and sterilisation chemicals used in pharmaceutical and biotech cleanrooms (hydrogen peroxide vapour, peracetic acid, isopropyl alcohol)
Multi-core flexible construction with controlled cable OD — the cable is designed for routing in the confined spaces of semiconductor process tools, pharmaceutical filling lines, and cleanroom equipment where space is at a premium and the cable must not obstruct laminar airflow
Packaged in cleanroom-compatible materials — the cable is supplied on plastic (not wooden) reels, sealed in polyethylene bags, with the reel flanges and packaging free of particulate-shedding materials (cardboard, paper labels, loose fibres); the cable can be introduced directly into the cleanroom without an external decontamination step
Resistant to cleanroom cleaning agents — the PUR or LSZH jacket withstands repeated wiping with isopropyl alcohol (IPA), hydrogen peroxide, and quaternary ammonium disinfectants without surface degradation, cracking, or increased particulate generation

Applications

Semiconductor fabrication equipment — cleanroom cable for wafer handling robots, process chamber instrumentation, vacuum pump connections, and lithography tool internal wiring where silicone outgassing would cause wafer defects and the cable must survive the cleanroom's chemical and thermal environmentPharmaceutical filling and packaging lines — cable for aseptic filling machines, capping machines, labelling equipment, and conveyor systems in pharmaceutical ISO Class 5–7 cleanrooms; the cable must resist the hydrogen peroxide vapour (VHP) used for room and equipment sterilisation and be compatible with the cleanroom's cleaning and disinfection protocolsBiotechnology and life science laboratories — cable for centrifuge, incubator, PCR machine, and analytical instrument connections in biotech cleanrooms where the cable must not outgas compounds that would contaminate biological samples or interfere with sensitive analytical measurementsMedical device manufacturing — cable for cleanroom assembly and testing equipment in medical device manufacturing (catheters, implants, surgical instruments) where the cleanroom environment requires low-particulate, chemically resistant cableFlat panel display and photovoltaic manufacturing — cleanroom cable for the process tools and material handling systems in FPD and solar cell fabrication facilities where the cable must not contaminate the glass substrate or silicon wafer with particulates, outgassed organics, or siliconeAerospace and precision optics assembly — cable for the cleanroom assembly and testing of satellite components, optical systems, and precision mechanical assemblies where the cable must meet the same contamination control standards as the products being assembledFood and beverage aseptic processing — cable for the electrical services to aseptic filling and packaging equipment in food and beverage cleanrooms where the cable must survive the wet, chemically aggressive cleaning environment (foam cleaning, CIP chemicals, pressurised water washdown)

Technical Specifications

Cleanroom Compatibility ISO 14644-1 (Cleanroom classification — particulate cleanliness); ISO 14644-8 (Classification of airborne molecular contamination); SEMI E49 (Guide for the evaluation of materials for semiconductor manufacturing equipment — outgassing and materials compatibility); the cable is designed for ISO Class 3–7 cleanroom environments (Class 3 for semiconductor fab, Class 5–7 for pharmaceutical and medical device)
Silicone-Free The cable contains no silicone (polydimethylsiloxane, PDMS) in the insulation, sheath, filler elements, colour concentrates, or any manufacturing process aid; silicone content verified by FTIR (Fourier Transform Infrared) spectroscopy or XRF (X-ray Fluorescence) analysis per the customer's specification
Low Outgassing — ASTM E595 Total Mass Loss (TML) <1.0%; Collected Volatile Condensable Material (CVCM) <0.1% per ASTM E595 (standard test for outgassing from spacecraft materials — adopted by the semiconductor industry for cleanroom material qualification); the test measures the mass of material that evaporates from the cable in vacuum at 125°C and condenses on a cooled collector plate
Rated Voltage 300/500 V (standard for cleanroom equipment control and instrumentation circuits); 0.6/1 kV available for process tool power supply cables
Conductor Material Bare copper or tinned copper; IEC 60228 Class 5 flexible stranded; the conductor is clean — free of surface oxides and drawing lubricants that would contribute to outgassing or particulate contamination
Conductor Cross-Sections 0.5, 0.75, 1.0, 1.5, 2.5, 4, 6, 10, 16, 25, 35 mm² for power/control; 0.22, 0.34, 0.50, 0.75 mm² for signal and instrumentation
Core Count 2–37 cores per the customer's equipment wiring specification
Core Insulation — PP/PE (Standard) Polypropylene (PP) or polyethylene (PE); 75–90°C; halogen-free; the thin-wall insulation minimises the cable OD while providing the 300/500 V dielectric rating
Core Insulation — FEP/PTFE (High-Temp/Chemical) Fluorinated ethylene propylene (FEP) or polytetrafluoroethylene (PTFE); 150–200°C; for semiconductor process tool wiring where the cable is exposed to elevated temperatures (wafer processing chambers, heated chemical delivery lines) and aggressive chemicals (HF, HCl, NH₃, silane)
Core Identification Numbered black cores per VDE 0293 (standard for cleanroom equipment wiring); colour coded on request; the numbering ink or colour compound must be cleanroom-compatible — no silicone-based colour carriers
Overall Shield (Optional) Aluminum/polyester foil (100% coverage) + tinned copper braid (≥85% coverage); for EMI protection of sensitive sensor and communication signals in the electrically noisy environment of semiconductor process tools (RF plasma generators, microwave power supplies, high-frequency switching power supplies)
Outer Jacket — PUR (Standard) Polyurethane (PUR TMPU); Shore A 85–90; halogen-free; smooth, glossy surface finish; PUR is the preferred cleanroom cable jacket because it combines chemical resistance (to cleanroom cleaning agents and disinfectants), mechanical durability (abrasion and flex resistance), and cleanroom compatibility (smooth surface, low particulate generation, low outgassing)
Outer Jacket — LSZH Low smoke zero halogen compound; smooth finish; for cleanroom cables where fire safety (halogen-free in an enclosed cleanroom environment) is the priority and chemical resistance to aggressive cleaning agents is not required
Outer Jacket — FEP (High-Purity) Fluorinated ethylene propylene; 200°C; chemically inert; the highest-purity jacket for the most demanding semiconductor cleanroom applications — FEP outgasses less than any other cable jacket material and is resistant to all semiconductor process chemicals
Jacket Colour — Standard Grey, black, or blue (cleanroom equipment standard colours); white on request for pharmaceutical cleanrooms where the cable must blend with the white cleanroom wall and equipment panels
Jacket Surface Finish Smooth, glossy, non-porous; the jacket is extruded with a polished die to produce a surface that does not trap particles and can be wiped clean; surface roughness Ra <1.0 μm per ISO 4287 measured on the cable jacket
Particulate Testing — Optional The finished cable can be tested for particulate shedding per IEST-RP-CC003 (cleanroom garments and wipers) adapted for cable — the cable is flexed in a controlled environment and the particles released are counted and sized per ISO 14644-1; test report available on request
Maximum DC Conductor Resistance at 20°C Per IEC 60228 Class 5 for the conductor cross-section
Insulation Resistance at 20°C ≥100 MΩ·km (at 500 V DC, 1 min)
Test Voltage (AC) — Routine 2 000 V AC / 5 min (300/500 V); 3 500 V AC / 5 min (0.6/1 kV)
Temperature — PUR Jacket (Fixed) -50°C to +90°C
Temperature — PUR Jacket (Flexing) -30°C to +80°C
Temperature — LSZH Jacket (Fixed) -30°C to +70°C
Minimum Bend Radius 7.5× cable OD (flexing during equipment installation); 4× cable OD (fixed routing in the equipment)
Chemical Resistance — PUR Good resistance to isopropyl alcohol (IPA), hydrogen peroxide (H₂O₂ up to 30%), quaternary ammonium disinfectants, and peracetic acid — the standard cleanroom cleaning and sterilisation agents; PUR is attacked by strong acids and alkalis — for semiconductor cleanroom environments with HF, HCl, or NH₃ exposure, specify FEP jacket
Flame Retardant — LSZH/PUR IEC 60332-1-2
Halogen-Free — PUR/LSZH IEC 60754-1 (HCl <0.5%); PUR and LSZH are inherently halogen-free
Packaging — Cleanroom Compatible Plastic reel (polypropylene or ABS — no wood that sheds fibres and particulates); polyethylene bag seal (heat-sealed, not taped with particulate-shedding adhesive tape); reel flanges clean and free of burrs; the cable is manufactured, wound, and packaged in a controlled environment area (CEA) and double-bagged for introduction into the cleanroom
Certifications CE; RoHS; SEMI E49 / ASTM E595 outgassing test report available on request; silicone-free certification available on request; ISO 9001 manufactured

Detailed Description

What Is Cleanroom Rated Cable?

Cleanroom rated cable is a flexible multi-core cable in which every material — insulation, filler, binder tape, jacket, colour concentrate, and packaging — is selected, tested, and controlled to minimise contamination of the cleanroom environment. The cable does not shed particles that would increase the cleanroom's particulate count (ISO 14644-1). It does not outgas volatile organic compounds (VOCs) that would condense on wafer surfaces, optical components, or pharmaceutical product contact surfaces (ISO 14644-8). It contains no silicone (PDMS — polydimethylsiloxane) that would contaminate semiconductor photolithography processes. And the jacket is formulated to resist the cleaning and sterilisation chemicals used in the specific cleanroom application.

A standard industrial cable installed in a semiconductor cleanroom would fail on all counts: the PVC jacket's plasticizers migrate to the surface, trapping particles; the PVC outgasses phthalates and other VOCs; the jacket surface is microscopically rough, providing particle attachment sites; the manufacturing process uses silicone lubricants on the conductor drawing and stranding; and the wooden reel and cardboard packaging introduce fibres and particulates into the cleanroom. A cleanroom cable is designed to eliminate each of these contamination sources.

Why Silicone-Free Matters — The Semiconductor Contamination Problem

In semiconductor manufacturing, a single silicone molecule (PDMS, molecular weight 300–10 000 g/mol) landing on a wafer during photolithography creates a defect that can render the entire die non-functional. PDMS is a particularly problematic contaminant because:

  • It is extremely surface-active — a monolayer of PDMS on a wafer surface changes the surface energy and prevents uniform photoresist coating
  • It is volatile at the elevated temperatures of semiconductor process chambers (CVD, PVD, etch) and can migrate from a contaminated surface to a clean wafer through the gas phase
  • It is difficult to remove — PDMS is not water-soluble and requires aggressive cleaning (piranha solution — H₂SO₄/H₂O₂) to remove from surfaces
  • It is ubiquitous — silicone is used as a lubricant in many industrial processes, including standard cable manufacturing (silicone oil on conductor drawing dies, silicone release agents on extrusion tooling)
A cleanroom cable that is manufactured with silicone-free materials and processes eliminates this contamination risk. The "silicone-free" certification means that every material in the cable — from the copper conductor to the jacket colour concentrate — has been verified by FTIR or XRF analysis to contain zero detectable silicone. The manufacturing process uses non-silicone lubricants and release agents. And the cable is tested as a finished product to confirm that no silicone contamination has been introduced during manufacturing.

Why Choose Yichi Cleanroom Rated Cables

  • Silicone-free verified — FTIR/XRF analysis on request: Every material in the cable is verified silicone-free by chemical analysis. The finished cable is tested to confirm that no silicone contamination has been introduced during the manufacturing process. A silicone-free certificate is provided with each cable batch
  • PUR, LSZH, or FEP jacket — select for the cleanroom chemical environment: PUR for pharmaceutical, biotech, and medical device cleanrooms where the cable is exposed to hydrogen peroxide vapour and quaternary ammonium disinfectants. LSZH for cleanrooms where fire safety is the priority and chemical exposure is moderate. FEP for semiconductor cleanrooms where the highest chemical purity and lowest outgassing are required and the cost premium is justified by the cost of wafer defects caused by cable contamination
  • Smooth, non-porous jacket surface — polished die extrusion: The jacket surface finish is not a cosmetic characteristic — it is a functional requirement for cleanroom cable. The glossy, non-porous surface (Ra <1.0 μm) minimises particle adhesion and allows the cable to be wiped clean with cleanroom wipers and IPA without releasing particles or leaving residue
  • Cleanroom-compatible packaging — double-bagged for cleanroom introduction: The cable is wound on plastic reels, sealed in polyethylene bags, and double-bagged for cleanroom introduction. The outer bag is removed in the grey area (cleanroom anteroom/airlock), and the inner bag is removed inside the cleanroom. The cable enters the cleanroom without carrying external contamination
  • ASTM E595 / SEMI E49 outgassing tested: The cable jacket and insulation materials are tested for outgassing per the semiconductor industry's standard test methods. The test report quantifies the TML (<1.0%) and CVCM (<0.1%) and demonstrates that the cable meets the outgassing limits for the customer's cleanroom ISO class and process sensitivity

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Product: Cleanroom Rated Cable — ISO 14644 Compatible Low Outgassing, Low Particulate, Silicone-Free LSZH or PUR Jacketed Multi-Core Flexible Cable with Smooth Non-Shedding Surface for Semiconductor Fab, Pharmaceutical, Biotech, and Precision Manufacturing Cleanroom Equipment Power, Control, and Instrumentation Wiring

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